http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190105089-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2fb272959740a2231f287ac6bf4d190a |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H2242-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-677 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45546 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32733 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45542 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45534 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-677 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate | 2018-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a882a27a168c10d36ad3550e3d07489 |
| publicationDate | 2019-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20190105089-A |
| titleOfInvention | Method of manufacturing plasma generating device, substrate processing device and semiconductor device |
| abstract | A high frequency power source for supplying power to a plasma generating unit, and a matching unit provided between the high frequency power source and the plasma generating unit, and matching a load impedance of the plasma generating unit with an output impedance of the high frequency power source; The high frequency power source includes a high frequency oscillator for oscillating high frequency, a directional coupler arranged at a rear end of the high frequency oscillator, for extracting a part of a traveling wave component from the high frequency oscillator and a reflected wave component from the matcher, and the directional coupler. A filter for removing a noise signal applied to the reflected wave component taken out by the second filter; the reflected wave component after passing through the filter; and the traveling wave component taken out by the directional coupler; and the reflected wave component from the matcher is reduced. Feedback control of the matcher It provides technical force with the monitor. |
| priorityDate | 2017-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 64.