abstract |
Provided are a photosensitive resin composition having a rapid progress of a cyclization reaction and excellent storage stability over time, a heterocyclic-containing polymer precursor, a cured film, a laminate, a method for producing a cured film, and a semiconductor device using the photosensitive resin composition. . A photosensitive resin composition comprising a heterocycle-containing polymer precursor selected from a polyimide precursor and a polybenzoxazole precursor and a solvent, wherein the amine value of the solid content of the photosensitive resin composition is 0.0002 to 0.0200 mmol / g. |