Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2211-416 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T5-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T5-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T3-4053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T3-4076 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T5-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T5-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T3-4069 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T3-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T5-00 |
filingDate |
2017-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_615a9fe186d241d65444be3c76b5d8e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35bf8b3fcbe51cace344824d7efcd7f2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a821a50e840dbb28222f4234e19a1cf |
publicationDate |
2019-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20190092605-A |
titleOfInvention |
System and method for reconstructing high resolution point spread functions from low resolution test images |
abstract |
A method of reconstructing one or more high resolution point spreading functions (PSFs) from one or more low resolution images includes obtaining one or more low resolution images of a wafer, aggregating one or more low resolution image patches, and one in one or more low resolution images. Estimating one or more subpixel shifts and simultaneously reconstructing one or more high resolution PSFs from the aggregated one or more low resolution image patches. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11343440-B1 |
priorityDate |
2016-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |