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publicationDate 2019-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20190092605-A
titleOfInvention System and method for reconstructing high resolution point spread functions from low resolution test images
abstract A method of reconstructing one or more high resolution point spreading functions (PSFs) from one or more low resolution images includes obtaining one or more low resolution images of a wafer, aggregating one or more low resolution image patches, and one in one or more low resolution images. Estimating one or more subpixel shifts and simultaneously reconstructing one or more high resolution PSFs from the aggregated one or more low resolution image patches.
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