| abstract |
The present invention relates to a corrosion resistant component adapted for use in a semiconductor processing reactor, wherein the corrosion resistant component comprises: a) a ceramic insulating substrate; And b) a white corrosion-resistant non-porous outer layer bonded to the ceramic insulating substrate, wherein the non-porous outer layer comprises at least 15% by weight of a rare earth compound based on the total weight of the non-corrosive non-porous layer, A white corrosion resistant non-porous outer layer having a composition to form a coating; And c) a L * value of 90 or greater as measured on the flat surface of the white corrosion resistant non-porous outer layer. Methods for their preparation are also described. |