| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eebd45a909f23b5e7c57275fd8e4a756 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2305-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2201-326
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2201-3227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2209-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2209-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2209-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2209-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2303-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2201-328
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2209-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2103-04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-722
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-008 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F103-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-30 |
| filingDate |
2012-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bf842c92990397386f9c1cd8fc5ad70 |
| publicationDate |
2019-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20190077584-A |
| titleOfInvention |
Method and system for providing ultrapure water |
| abstract |
A method and system for providing ultrapure water to a semiconductor manufacturing operation is provided. The ultrapure water is treated by using a free radical scavenging system and a free radical scavenging system. The free radical scavenging system may utilize actinic radiation with a free radical precursor compound such as ammonium persulfate. The free radical scavenging system may include the use of a reducing agent. The ultra pure water can be further processed by using an ion exchange medium and a degassing apparatus. A control system can be used to control the addition of precursor compounds to ultrapure water, the strength of the actinic radiation, and the addition of reducing agents. |
| priorityDate |
2011-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |