http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190074245-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8febfaf1ba2cd4bb90e85763804adf4a |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-056 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2223-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-0104 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2223-0123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-0421 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2221-037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0142 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2260-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0192 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2227-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-0478 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2260-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0153 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-054 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-084 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-04 |
| filingDate | 2018-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_912253e1faa3e678f9e31ee3b26228d6 |
| publicationDate | 2019-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20190074245-A |
| titleOfInvention | Automatic replacement method of high-pressure gas tank |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of automatically replacing a high-pressure gas cylinder, wherein a high-pressure gas cylinder is loaded in a lift of a cabinet to supply gas from a FAB process (semiconductor fabrication facility) Pressure cylinder is connected to the connector holder after separating the high-pressure gas cylinder from the connector holder at the point of time, thereby realizing automation by replacing the high-pressure gas cylinder. To this end, according to the present invention, first and second high pressure gas cylinders 201 and 202 are loaded on a pair of lifts 400 installed in the cabinet 100 so as to be able to move up and down, Pressure gas cylinder 202 and the valve connector 211 of the second high-pressure gas cylinder 202 is connected to the connector holder 310 and waits; and during the supply of gas from the first high-pressure gas cylinder 201 When the replacing time of the first high-pressure gas cylinder 201 is detected by the control unit 500, the supply of the gas from the first high-pressure cylinder 201 is stopped by switching the oil passage, and the gas is supplied from the second high- A third step of automatically locking the valve handle 213 of the first high-pressure gas cylinder 201 and a third step of releasing the connection state of the first high-pressure gas cylinder 201 from the connector holder 310, A fourth step of locking the valve connector 211 to the cap 212, and a fourth step of locking the valve high- A fifth step of lowering the die 410 to a bottom dead center, a sixth step of automatically removing the gasket used from the connector holder 310, The third high pressure gas cylinder 203 is placed on the die 410 after the first high pressure gas cylinder 201 is removed from the die 410 by opening the door of the cabinet 100, A step 9 of clamping the third high pressure gas cylinder 203 placed on the die 410; a step 10 of automatically inserting a new gasket into the connector holder 310; Elevating the lift 400 to which the high pressure gas cylinder 203 is loaded to the top dead center and then aligning the center of the valve connector 211 and the center of the connector holder 310; 203 and then the valve connector 211 to the connector holder 310 And a thirteenth step of waiting for the valve handle (213) of the third high-pressure gas cylinder (203) to open and waiting. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115013726-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115013726-A |
| priorityDate | 2017-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.