http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190070857-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8febfaf1ba2cd4bb90e85763804adf4a |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0153 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-0478 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B66F7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-084 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B66F7-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-04 |
| filingDate | 2018-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e75ab9aa4bf70dfb43dafc707fed4c4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_912253e1faa3e678f9e31ee3b26228d6 |
| publicationDate | 2019-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20190070857-A |
| titleOfInvention | Automatic alignment method of high-pressure gas tank |
| abstract | In the present invention, a high pressure gas cylinder is loaded on a lift of a cabinet so as to supply a gas from a fabrication process facility of a semiconductor to a wafer production line. Then, the high pressure gas cylinder to which the lift is loaded is raised, The present invention relates to a method of automatically aligning a high-pressure gas cylinder for automatically aligning the center of a connector holder of an end cap and a gas pipe, and a high-pressure gas cylinder loaded in the lift is automatically And the center of the end cap of the valve coupled to the high-pressure gas cylinder is aligned with the center of the connector holder connected to the gas piping so that the high-pressure gas cylinder replacement can be automatized. The horizontal position of the end cap 213 of the valve 210 installed on the upper portion of the high-pressure gas cylinder 200 is shifted in the horizontal direction center of the connector holder 310 The lift 400 is raised so that the center of the end cap 213 is aligned with the center of the connector holder 310 while rotating the high pressure gas cylinder 200 and then the lift 400 is lifted and lowered And the Z center of the end cap 213 is aligned with the Z center of the connector holder 310. |
| priorityDate | 2017-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548998 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23969 |
Total number of triples: 21.