http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190067929-A

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filingDate 2017-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20190067929-A
titleOfInvention Uses of silyl-bridged alkyl compounds for dense OSG films
abstract Low dielectric materials and films comprising them have been found to have improved performance when used as an interlevel dielectric in integrated circuits and methods of making same.
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