| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_099413ae0cf5a2b6398b5151766cd260 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02675 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2017-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_877f21e36c76da17648b30d97b514cfb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b84999121a0af5fe5951cb6bc307e267
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_685c987a77093122fcf86e663c9e5b33 |
| publicationDate |
2019-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20190066647-A |
| titleOfInvention |
Laser crystallization apparatus |
| abstract |
The laser crystallization apparatus includes a laser generator for generating an incident laser beam; An optical system for photo-converting an incident laser beam to generate an output laser beam; A phase shift mask for shifting the phase of the emitted laser beam within a predetermined transition angle range; And a stage on which a substrate including a target thin film to be laser crystallized by irradiating an output laser beam is mounted. |
| priorityDate |
2017-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |