| abstract |
The present invention relates to a surface treatment composition comprising at least one water-soluble polymer selected from the following Group A, at least one anionic surfactant selected from the following Group B, and water: Group A: water-soluble polysaccharides, polyvinyl alcohol and derivatives thereof, and polyvinylpyrrolidone and derivatives thereof (excluding the compounds contained in Group B below) Group B: a compound having a sulfonic acid (salt) group, a compound having a sulfuric acid ester (salt) group, a compound having a phosphonic acid (salt) group, a compound having a phosphoric acid (salt) group and a phosphinic acid (salt) group. According to the present invention, there is provided a surface treatment composition capable of efficiently removing foreign matters such as particles and organic residue remaining on the surface of a polished finished object to be polished. |