| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7848
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823821
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-435
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate |
2017-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1ef982532360cf6965e95c748db9cf6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa47b0c65a95ee3029d44b5ecee529ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfbc1c94c3df620a48322737a3eaf738
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_741e271446c234edca45ff4d5002c71c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba8db422972ccb1ac3fdebb08ef5c3de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c837644a23a9ac6a9c25eccd6373f87f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_205dec6174d06aa5e64e0c2d379848ae |
| publicationDate |
2019-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20190052496-A |
| titleOfInvention |
Semiconductor device and Method of fabricating the same |
| abstract |
A semiconductor device and a method of manufacturing the same are provided. A method of manufacturing a semiconductor device includes forming sequentially first and second epitaxial layers on a semiconductor substrate; Forming a well impurity layer doped with first dopants of a first conductivity type in the second epitaxial layer; Forming a channel layer on the second epitaxial layer including the well impurity layer; Patterning the channel layer and the second epitaxial layer to form active patterns, each of the active patterns including a second epitaxial pattern and a channel pattern on the second epitaxial pattern; Forming a gate electrode across the active patterns; And forming source and drain impurity layers in the channel patterns of the active patterns on both sides of the gate electrode. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210118322-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230012829-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230060982-A |
| priorityDate |
2017-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |