Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47ddf9350e933f26adf5fbcf4f95fc9a |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12Q1-6869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12Q2565-607 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-058 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4145 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-221 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12Q1-6869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-3278 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C12Q1-6869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-01 |
filingDate |
2017-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6213eacfaa34cda0ee016c6e890686d9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5d09745001ae7bbc85058b3004f1741 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eadf39bd7bc8285ff3958e5d260b83c8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b5c6e9e63f859f1375795283c26b8ec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a8c8bcd108933f4de1e0a07112aff89 |
publicationDate |
2019-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20190034605-A |
titleOfInvention |
Multi-electrode structures for molecular sensing devices and methods of making them |
abstract |
Structures available in molecular sensor devices include a substrate defining a substrate plane and spaced pairs of electrode sheets attached to the substrate at an angle to the substrate plane. The structure includes an inner dielectric sheet between each of the electrode sheets in each pair of electrode sheets and an outer dielectric sheet between each pair of electrode sheets. Fabrication methods for fabricating structures for molecular sensors, including oblique deposition of electrodes and dielectric layers, planarization of the resulting stack, and removal of the ends of each inner dielectric sheet to form grooves therein are further disclosed. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D929133-S |
priorityDate |
2016-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |