http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190034605-A

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filingDate 2017-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20190034605-A
titleOfInvention Multi-electrode structures for molecular sensing devices and methods of making them
abstract Structures available in molecular sensor devices include a substrate defining a substrate plane and spaced pairs of electrode sheets attached to the substrate at an angle to the substrate plane. The structure includes an inner dielectric sheet between each of the electrode sheets in each pair of electrode sheets and an outer dielectric sheet between each pair of electrode sheets. Fabrication methods for fabricating structures for molecular sensors, including oblique deposition of electrodes and dielectric layers, planarization of the resulting stack, and removal of the ends of each inner dielectric sheet to form grooves therein are further disclosed.
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