http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190034148-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3b10024b9fe3eb940006e1ae7cc8b26 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate | 2017-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9177faed0bad24e25d111f442e4fcb64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05676c3f57b8b25de3908a28d9d2f811 |
| publicationDate | 2019-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20190034148-A |
| titleOfInvention | Resist stripper liquid composition |
| abstract | The present invention provides a resist stripping liquid composition having excellent resist stripping performance and very little redeposition (resist residues) of a resist stripper at the time of pure water rinsing, wherein (A) 100 parts by mass of resist stripping solution (B) a surfactant comprising an indium tin oxide (ITO) film on a quartz oscillator measurement substrate in a quartz oscillator microbalance method, and (B) 0.01 to 10 parts by mass of a surfactant having an oxyalkylene group in the molecule, Wherein the amount of the surfactant (B) to be bonded is 1 nmol / cm 2 or more and 20 nmol / cm 2 or less, and the amount of the ITO The flow rate of the flowing water at the membrane surface is 0.1 mL / min, and the oscillation frequency of the quartz crystal is 4.95 MHz). |
| priorityDate | 2016-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.