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publicationDate 2019-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20190017333-A
titleOfInvention Manufacturing method of YOF based powder
abstract The present invention, Y 2 O 3 powder and the YF 3 heat treating the mixed powder of mixing the powder and the Y 2 O 3 powder and the YF 3 powder, including a step of synthesizing a YOF-based powder and the Y 2 O 3 powder And the YF 3 powder are mixed at a weight ratio of 1: 2 to 2: 1, and the heat treatment is performed at a temperature of 400 to 1400 ° C. According to the present invention, an YOF-based powder having a small generation of contaminating particles and excellent plasma plasma characteristics can be produced by a simple process, and a YOF-based powder having a high purity can be produced at low cost.
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