abstract |
The present invention, Y 2 O 3 powder and the YF 3 heat treating the mixed powder of mixing the powder and the Y 2 O 3 powder and the YF 3 powder, including a step of synthesizing a YOF-based powder and the Y 2 O 3 powder And the YF 3 powder are mixed at a weight ratio of 1: 2 to 2: 1, and the heat treatment is performed at a temperature of 400 to 1400 ° C. According to the present invention, an YOF-based powder having a small generation of contaminating particles and excellent plasma plasma characteristics can be produced by a simple process, and a YOF-based powder having a high purity can be produced at low cost. |