http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190013730-A

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filingDate 2017-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bb3457d8bbd4f852c18e804f65cee03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1583171c96e69dd71dd78a7275efc5d1
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publicationDate 2019-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20190013730-A
titleOfInvention The resist underlayer film forming composition
abstract [PROBLEMS] To provide a novel low resist film forming composition. [Means for Solving the Problem] The following formula (1a) and / or formula (1b) [In the formulas (1a) and (1b), two R 1 s each independently represent an alkyl group, an alkenyl group, an aromatic hydrocarbon group, a halogen atom, a nitro group or an amino group, and two R 2 s each independently represent a hydrogen atom, , An acetyl group, an acyl group or a glycidyl group, R 3 represents an aromatic hydrocarbon group or a heterocyclic group which may have a substituent, R 4 represents a hydrogen atom, a phenyl group or a naphthyl group, each independently represents 0 or 1, m is an integer of from 3 to 500, p is an integer of from 3 to 500, X is -C 2 that represents a benzene ring, the benzene ring bonded (CH 3) 2 -Group is in the relation of a meta position or a para position], and a solvent.
priorityDate 2016-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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