| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3215
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31155 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3215 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3215
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2017-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33d689d241ec290c64ae639d47629fb5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7875f2015788c236da2582bbfd32ba8b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a61e53769f8d13ed96746431120e6547 |
| publicationDate |
2019-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20190012171-A |
| titleOfInvention |
Functionalized guide pattern formation method for grape epitaxy method |
| abstract |
A method for forming a functionalized guide pattern for self-assembly of a block copolymer by grapefĎŠncaxis, comprising the steps of: providing a first functionalized layer (2) on a substrate (1) ; Depositing a protective layer (3) on the first functionalized layer (2); The method of claim 1, further comprising: forming a guide pattern (4) on the protective layer (3), the guide pattern (4) comprising at least one cavity (7) ) Comprises a bottom surface (6) and a side wall (5); - (104) The protective layer 3 located on the underside of the cavity by exposure to ion bombardment so that the implanted portion 9 of the protective layer can be selectively etched relative to the non-implanted portion 8 of the protective layer. Injecting ions having an atomic number of less than 10 into the portion (9) of the substrate; (10) in the cavity (7), wherein the second functionalized layer (10) comprises a first portion disposed on the protective layer (3) at the lower surface (6) of the cavity (11) and a second portion (12) disposed on a side wall (5) of the cavity; And selectively etching the first portion (11) of the second functionalized layer (10) and the implanted portion (9) of the protective layer to form a portion (13) of the first functionalized layer, . |
| priorityDate |
2016-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |