| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2017-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd836f00fdf0fa376bc6038ada80053c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6e74613f0b84418f21b2891c0b42f3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f58da9bf20fb9e7842d33f17179ee61b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a993018ac4afd2051f72f1d79bb81718
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e221f95aa0c72a7bb10b2eef66f0a3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_664d6ec30c7e15d3fa1749bc5f724b95 |
| publicationDate |
2018-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180134916-A |
| titleOfInvention |
Abrasive material, composition for polishing and polishing method |
| abstract |
An abrasive, a polishing composition, and a polishing method capable of polishing a surface of an alloy or a metal oxide at a sufficient polishing rate and capable of obtaining a high-quality mirror surface. The abrasive contains alumina having an α conversion rate of 80% or more and a 50% particle diameter in a volume-based integrated particle diameter distribution of 0.15 μm or more and 0.35 μm or less. The polishing composition contains this abrasive and has a pH of 7 or less. The abrasive and polishing composition is used for polishing an object to be polished containing at least one of an alloy and a metal oxide. |
| priorityDate |
2016-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |