| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2510787818bd1624aa81395ed344a10f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 |
| filingDate |
2017-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c716ac306e3b480194dfd15bcb1ae657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d5a48207baf44b0c0816770f44d15a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_053b75231f09e5aeba5899a97020e0de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_617ec8193699ed051e61e51106f5aba6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ebc09d4553a2ce652d5b9365e5de9ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b56ac0e0b036a7421d49702b97018d0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abf488973207753fc54e007400b72116 |
| publicationDate |
2018-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180134104-A |
| titleOfInvention |
Method for manufacturing pellicle |
| abstract |
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a pellicle for lithography used as a vibration damping film when manufacturing a semiconductor device or a liquid crystal display or the like, and more particularly, to a method of manufacturing a pellicle for ultraviolet ray. B) attaching a pellicle film to the organic material substrate; c) attaching the organic material substrate on which the pellicle film is formed to a transfer frame; d) And e) transferring the pellicle film attached to the transfer frame to the pellicle frame. INDUSTRIAL APPLICABILITY According to the present invention, it is possible to produce a pellicle having an inorganic pellicle film with a very thin thickness and a good condition without wrinkles. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210031664-A |
| priorityDate |
2017-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |