| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f7f120efe096284c7389702c969cf3d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2239-0464 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-2027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-2068 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D39-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C19-08 |
| filingDate |
2017-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0719686974142d8ab76f84103d5b9aa2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24b686155c13e2e77c008488679089a9 |
| publicationDate |
2018-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180132051-A |
| titleOfInvention |
Filter, method of manufacturing the same, dry etching apparatus and dry etching method |
| abstract |
The present invention provides a filter capable of suppressing the decomposition of fluorinated saturated hydrocarbons when a composition containing a high concentration of fluorinated saturated hydrocarbons is filtered, even if at least a part of the portion in contact with the object to be treated is made of a metal or a metal compound. The filter of the present invention comprises a metal or metal compound part and an amine compound adsorbed on the surface of the part to be contacted with the object. Further, the method for producing a filter of the present invention includes a step of contacting an amine compound on the surface of a metal or metal compound part, which is in contact with a substance to be submitted. |
| priorityDate |
2016-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |