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filingDate 2018-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e92483cf14c75c319a8f9afa9a4b3802
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publicationDate 2018-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20180132016-A
titleOfInvention Acid generator compounds and photoresists comprising same
abstract Acid generator compounds which are particularly useful as photoresist composition components are provided. The acid generator compounds of the present invention comprise 1) a cyclic sulfonium salt and 2) a covalently bonded photoacid-labile group. In one aspect, thiosantronic acid generator compounds are particularly preferred, for example, acid generator compounds include (i) thioxanthone moieties; And (ii) at least one covalently bonded acid labile group.
priorityDate 2012-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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