Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_050fc7b82c5d17d9aeb63a7cdcc546b3 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-0038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00388 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00666 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 |
filingDate |
2017-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78b0cc2c3ac8672123b765311b899b59 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86e804beda1217e06245017901dc74e1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a19b9542b790477c9a1e0f00be78efd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3480a885f55188e1a4d1f559c249d3d |
publicationDate |
2018-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20180131891-A |
titleOfInvention |
Silicon nanowires formed between top and bottom of microscale sensor structures and manufacturing method thereof |
abstract |
Embodiments include forming a first oxide layer on a silicon substrate (S100), etching the silicon substrate to create a recessed region for separating the nanocrystal structure from the microscale sensor structure using the first oxide layer as a mask Forming a second oxide film on the silicon substrate through a thermal oxidation process (S300); etching the recessed region to a predetermined depth in a vertical direction (S400); forming a third oxide film (S500), and etching the silicon substrate (S600) so that the nanowire structure is suspended while the floating nanowire is removed. The micro-scale sensor structure is disposed between the upper and lower ends of the microscale sensor structure ≪ / RTI > |
priorityDate |
2017-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |