| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2031-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2033-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2035-0833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2011-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D135-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C35-0805
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-30 |
| filingDate |
2017-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4a27a932caaa3821e0324178830105a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7013b426ebfc16645380cc0a58bcc4f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_198e601c60c434db2e9d3b90cc6d0385
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56c3813559509189f67d33d287585247
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4ccaf356da6f8c6ed8d980f79f39ff2 |
| publicationDate |
2018-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180126026-A |
| titleOfInvention |
Pattern forming method, manufacturing method of substrate, optical component manufacturing method, circuit board manufacturing method, electronic component manufacturing method, and imprint mold manufacturing method |
| abstract |
A layer containing the curable composition (A1) containing the polymerizable compound (a1) is formed on the surface of the substrate and a liquid containing the curable composition (A2) containing the polymerizable compound (a2) ), A mixed layer in which the curable composition (A1) and the curable composition (A2) are partially mixed is sandwiched between the mold and the substrate, and the mold side To cure the mixed layer and to peel off the mold from the mixed layer after curing to form a pattern of the cured product on the substrate. At this time, the viscosity of the composition excluding the solvent from the curable composition (A1) at 25 ° C is less than 500 mPa · s and the viscosity of the composition excluding the solvent from the curable composition (A2) at 25 ° C is set to 1 mPa · S or more and less than 40 mPa · s, a pattern of the cured product is uniformly formed in a plurality of shot regions of the substrate. |
| priorityDate |
2016-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |