| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bd0cdbc5c67cf4957ed83c89140748e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-658
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3284
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-457 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-457
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-64 |
| filingDate |
2016-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85086984bcd3bb64412b35ee7d143d94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb8278a491aa5bf650c81e0f2d9e1d65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9e493e2fd0761d0697c7fafc37f4f4b |
| publicationDate |
2018-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180116293-A |
| titleOfInvention |
Sn-Zn-O oxide sintered body and manufacturing method thereof |
| abstract |
A Sn-Zn-O-based oxide sintered body having high mechanical strength, high density and low resistance and used as a sputtering target and having high Sn concentration and a method of manufacturing the same are provided. (X) at least one additive element (X) selected from the group consisting of Nb, Ta, W and Mo is added at a ratio of atomic ratio Sn / (Zn + Sn) (Sn + Zn + X) with respect to the total amount of the element (X) is 0.001 or more and 0.1 or less, and the relative density is 95% or more and the specific resistance is 1 Ω · cm or less. Sn-Zn-O-based oxide sintered body having a Sn concentration of at least 70% by volume in an atmosphere of a sintering furnace at a temperature raising rate from 700 ° C to a sintering temperature of 0.4 ° C / min to 0.8 ° C / min, a sintering temperature of 1300 Deg.] C or higher and 1460 deg. C or lower, and more preferably 10 hours or more and 30 hours or less. |
| priorityDate |
2016-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |