http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180114538-A

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filingDate 2018-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2018-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20180114538-A
titleOfInvention Low profile transducer module
abstract A transducer structure is disclosed. The transducer structure may include a MEMS structure positioned on a first side of a substrate and a substrate coupled to a first side of the substrate and having a lid covering the MEMS structure. The substrate may include an electrical contact that is laterally displaced from the lid on the first side of the substrate and is electrically coupled to the MEMS structure.
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Total number of triples: 25.