http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180111596-A

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filingDate 2018-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6d2e03f5fb4fad89c6a276323208e81
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publicationDate 2018-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20180111596-A
titleOfInvention Resist composition, method of forming resist pattern, compound and acid diffusion control agent
abstract 1. A resist composition which generates an acid upon exposure to light and changes solubility in a developer by the action of an acid, wherein the resist composition comprises a base component (A) in which the solubility in a developer is changed by the action of an acid, (D1) represented by the following general formula (1). In the general formula (d1), R d01 and R d02 are each independently a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent. Alternatively, R d01 and R d02 may combine with each other to form a condensed ring. m is an integer of 1 or more, and M m + represents an organic cation of m. [Chemical Formula 1]
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priorityDate 2017-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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