http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180104736-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ccfee51074117c6961593015b14f0dd9 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-265 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate | 2017-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5101af4de97d10db3998d588e9e27890 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecec36108c5a44e4283b046bea71387c |
| publicationDate | 2018-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20180104736-A |
| titleOfInvention | Surface treatment composition and surface treatment method of resist pattern using the same |
| abstract | [PROBLEMS] A surface treatment composition having an excellent coating property, capable of improving heat resistance of a resist pattern and making a resist pattern less soluble in a solvent; A method of surface treatment of a resist pattern using the composition; And a method of forming a resist pattern using the composition. [Solution] The present invention provides a surface treating composition comprising a solvent and a polysiloxane compound soluble in the solvent. A silicon atom which is a constituent atom of the polysiloxane is connected to a nitrogen-substituted hydrocarbon group, and the silicon atom is directly bonded to a carbon atom in the hydrocarbon group. The present invention provides a method of surface treatment of a resist pattern using the composition and a method of forming a resist pattern using the composition. |
| priorityDate | 2016-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.