| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5396826ac8c36d31e3eb53c9ef088a68 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01M2300-0068 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4482
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4583
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01M10-0562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4488
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M10-0562 |
| filingDate |
2017-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_764204436fd48633aa185b7de2ae1f09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a1c8697d5d83d8a8ad7d66cae0e54eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8da6ed2a0b7a6f6d0a6058f5ee762675 |
| publicationDate |
2018-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180086663-A |
| titleOfInvention |
Conformal deposition method and device of lithium phosphate thin film electrolytes for 3D solid state batteries by MOCVD |
| abstract |
The present invention relates to a method and an apparatus for uniformly depositing a lithium phosphate thin film electrolyte for a three-dimensional solid-state battery by metal-organic chemical vapor deposition, and more particularly, to a method and apparatus for uniformly depositing lithium phosphate thin film electrolyte using a lithium precursor, a phosphate precursor, And depositing the lithium phosphate thin film electrolyte on the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111430787-A |
| priorityDate |
2017-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |