http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180079138-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49d442475667956f38b73d9ae60830e5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D1-00 |
| filingDate | 2016-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c74b3ddca7764ae5d1efc2a59b360c15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b792d14c3ae404e5cb24c8c2cbb1cf0c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c48b366d2ab9ee26f0d9b04296372ee8 |
| publicationDate | 2018-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20180079138-A |
| titleOfInvention | Manufacturing method of High-Sensitivity and Low-Hysteresis Porous MIM-Type Capacitive Humidity Sensor Using Functional Polymer Mixed with titanium dioxide Microparticles |
| abstract | The present invention improves the properties of a porous metal-insulator-metal (MIM) type capacitive humidity sensor using a functional polymer mixed with TiO 2 fine particles and a porous upper electrode, and provides a high sensitivity, low-hysteresis, A low-hysteresis porous MIM-type capacitive humidity sensor using a functional polymer mixed with TiO 2 microparticles, which realizes a high-sensitivity, low-hysteresis porous MIM-type capacitive humidity sensor. And a manufacturing method thereof. The humidity sensor consists of an optimally designed porous upper electrode, a functional polymer moisture sensing layer, a lower electrode and a glass substrate. The porous top electrode is designed to increase the contact area between the sensing layer and the water vapor to provide a high sensitivity and a fast response time. Functional polymers mixed with TiO 2 microparticles have excellent low-hysteresis characteristics over a wide humidity sensing range and are excellent in long-term stability. The humidity sensor provides a high sensitivity of 0.85pF /% RH and a fast response time of less than 35 seconds when the relative humidity reaches 10% RH to 90% RH. In addition, the humidity sensor has a very low hysteresis of 0.95% RH at 60% RH, good temperature dependency, and stable capacitance values of up to 0.17% error rate during 120 hours of continuous testing. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210059515-A |
| priorityDate | 2016-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.