| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02329 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-02 |
| filingDate |
2017-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_def1e66f171cfd7af0ff3e3817c4e5da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a029f73be78d355478603a67427c5a0 |
| publicationDate |
2018-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180073490-A |
| titleOfInvention |
Impurity diffusion agent composition and method of producing semiconductor substrate |
| abstract |
A semiconductor substrate to which an impurity diffusion component is to be diffused is provided with a three-dimensional structure having minute pores of nanoscale on the surface thereof. A diffusion agent composition capable of uniformly and uniformly diffusing boron in a semiconductor substrate even when heated at a low temperature and a method for producing a semiconductor substrate using the composition of the present invention . (Solution to Problem) In the diffusion agent composition containing the impurity diffusion component (A), a boron compound capable of forming a diffusion layer by applying the impurity diffusion component (A) to the surface of a semiconductor substrate and containing nitrogen atoms is used . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210155011-A |
| priorityDate |
2016-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |