http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180064280-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2017-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24dcbd9380e4964d48abc1ea43205d5c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b5042896c81235c3d689615660a263b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffd22b8af4aecabc91272f3586193a99 |
| publicationDate | 2018-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20180064280-A |
| titleOfInvention | Multiple control modes |
| abstract | Systems and methods that use variables based on a plurality of states associated with a plasma system are described. The method includes determining whether a state associated with the plasma system is a first state, a second state, and a third state, and determining a first variable upon determining that the state is a first state. The method further includes determining a second variable upon determining that the state is a second state and determining a third variable upon determining that the state is a third state. The method includes determining whether each of the first variable, the second variable, and the third variable is within a corresponding range from a corresponding threshold. The method includes providing instructions for varying the power supplied to the plasma chamber when the first variable, the second variable, and the third variable are determined to be outside a corresponding range from a corresponding threshold value. |
| priorityDate | 2016-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.