Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f517051dd4d265e5e931724f45b34ddc |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
filingDate |
2016-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6b4cc4378db7d4ba33f38b7b3389edc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f27efe57a54f6326f5206a0df2db426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67d364c20e63f21ecb4bc4f018991c47 |
publicationDate |
2018-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20180060722-A |
titleOfInvention |
Etchant composition for etching and method for etching semiconductor device using the same |
abstract |
The present invention is a composition for etching a titanium nitride film (TiN) / tantalum nitride film (TaN) laminated film, comprising hydrogen peroxide and an acid compound, and the remaining solvent. Another aspect of the present invention provides an etching process for a titanium nitride film (TiN) / tantalum nitride film (TaN) laminated film used in a semiconductor manufacturing process using the etching composition. The composition for etching according to the present invention can remove the titanium nitride film with excellent selectivity, minimize damage to the tantalum nitride film, and is excellent in storage stability. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11427759-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200077839-A |
priorityDate |
2016-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |