http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180060722-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f517051dd4d265e5e931724f45b34ddc
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06
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filingDate 2016-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6b4cc4378db7d4ba33f38b7b3389edc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f27efe57a54f6326f5206a0df2db426
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publicationDate 2018-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20180060722-A
titleOfInvention Etchant composition for etching and method for etching semiconductor device using the same
abstract The present invention is a composition for etching a titanium nitride film (TiN) / tantalum nitride film (TaN) laminated film, comprising hydrogen peroxide and an acid compound, and the remaining solvent. Another aspect of the present invention provides an etching process for a titanium nitride film (TiN) / tantalum nitride film (TaN) laminated film used in a semiconductor manufacturing process using the etching composition. The composition for etching according to the present invention can remove the titanium nitride film with excellent selectivity, minimize damage to the tantalum nitride film, and is excellent in storage stability.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11427759-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200077839-A
priorityDate 2016-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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