http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180059901-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-185 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J201-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J201-00 |
| filingDate | 2016-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a76c5f7e95ae277ee2476a50273c407 |
| publicationDate | 2018-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20180059901-A |
| titleOfInvention | METHOD FOR PRODUCING LAMINATE, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, AND LAMINATE |
| abstract | A method for producing a laminated body, a method of manufacturing a semiconductor device, and a laminated body, which can be mechanically peeled off from a carrier substrate at room temperature, wherein the voids are reduced and the peeling force stability is excellent. A method of manufacturing a laminated body having a first member having a carrier substrate and a second member having a processed substrate, the method comprising the steps of: providing an adhesive layer on at least one surface of the first member and the second member, Pressing the two members under the air pressure P1 and further heating at a temperature T2 exceeding 40 deg. C under the air pressure P2, and then processing the processed substrate to form a laminate; and the adhesive layer has a storage elastic modulus G'1 of not more than 1,000,000 Pa, a storage elastic modulus G'2 at a temperature T2 of not more than 1,000,000 Pa, Log (P2 / P1)? 2.1, and a machine-peelable laminate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200021230-A |
| priorityDate | 2015-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 365.