| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c4b5184b7a8fe02a0c2cc4e509230214 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L75-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J9-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L75-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2016-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2aba093332f439752e9c83bc274fca04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fb3bc8e1fad35447ccfeb315c1e7b49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0a605e5f1250d016ea487bc3127a2b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35bd6c159ae6dab30b15b9df3950b816 |
| publicationDate |
2018-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180055116-A |
| titleOfInvention |
Method for preparing porous polyurethane polishing pad |
| abstract |
The present invention relates to a method of manufacturing a porous polyurethane polishing pad for use in a chemical mechanical planarization (CMP) process of semiconductors, wherein the porous polyurethane polishing pad produced according to the manufacturing method of the embodiment comprises a large pore ) And a small pore (fine pores), thereby increasing the polishing efficiency through the fine pores and increasing the flow rate of the slurry through the mesopores, thereby enhancing the overall polishing efficiency. |
| priorityDate |
2016-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |