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publicationDate 2018-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20180046843-A
titleOfInvention Bulk-acoustic wave resonator and method for manufacturing the same
abstract A membrane layer for forming a cavity together with the substrate, and a resonance part formed on the membrane layer, wherein the membrane layer comprises a first layer, a material same as the first layer, A second aspect of the present invention provides a volume acoustic resonator comprising a first layer and a second layer.
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