http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180043727-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2017-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a7e67af3dd9c8a84405fd5f0815c44b |
| publicationDate | 2018-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20180043727-A |
| titleOfInvention | Cleaning apparatus and cleaning method |
| abstract | [PROBLEMS] To provide a novel cleaning device capable of smoothly cleaning the periphery and cross-section of a quadrangular plate. A cleaning device for cleaning the periphery and an end face of a quadrangular plate P is provided with a cleaning part 10 having an injection nozzle 13 movable relative to the plate P, The jetting nozzle 13 ejects a cleaning liquid to the peripheral edge and the end face of the plate-like member P in the direction perpendicular to the relative movement direction. |
| priorityDate | 2016-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 91.