| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0272d70c9ba3abebfdf08dc6b96f1120 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02568 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 |
| filingDate |
2018-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e5bd107d395aa4fa058f5d7879ab009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18d74190748a8931594f77595ac76ce2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c43ee3ad66c46edb4cdbe9b4a3c0a0ff |
| publicationDate |
2018-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180038430-A |
| titleOfInvention |
Preparing method of metal chalcogenide thin film using laser |
| abstract |
A method of manufacturing a metal chalcogenide thin film using the laser, a metal chalcogenide thin film produced by the method, and a device including the metal chalcogenide thin film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230076968-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190121632-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115611314-A |
| priorityDate |
2018-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |