http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180033130-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f5aadf4782038d239836253f980a509 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D06F37-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D06F35-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D06F39-083 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D06F39-14 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D06F35-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D06F39-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D06F39-08 |
filingDate | 2016-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f61c77a2bf33a4c2164d7484a42ee95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_088d71f1bfc786a75032ba6ab51c2d85 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_841fc9d5cf7848b6ff3efbc1b67fa2a1 |
publicationDate | 2018-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20180033130-A |
titleOfInvention | Improved substrate processing apparatus and method |
abstract | An apparatus (10) for use in processing one or more substrates with a plurality of solid particles, comprising: a) a housing (20) in which the drum (40) is rotatably built; b) a door (60) movable between an open position in which one or more substrates may be introduced into the drum and a closed position in which the device is substantially sealed; c) a separator (100) mounted on the door and including a perforation portion; d) a flow path pipe (110) mounted on or in the housing and including an outlet (140); And e) pumping means (210) configured to pump the treatment liquid and a plurality of solid particles from the first position through the flow path pipe towards the separator from the outlet, the separator being arranged to guide a plurality of solid particles within the drum , And the separator is arranged to guide a part of the treatment liquid to a position other than the drum. |
priorityDate | 2015-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 224.