| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2016-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5f062567583e1ff4197aee7ca9cc5a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1d8bbd2938fd8f7e5579871219c759e |
| publicationDate |
2018-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180016523-A |
| titleOfInvention |
Sensitive active or radiation-sensitive composition, and an active radiation or radiation-sensitive composition film |
| abstract |
An object of the present invention is to provide an actinic ray-sensitive or radiation-sensitive composition which is excellent in thermal stability and can achieve high sensitivity and good roughness characteristics. (A) an organic-inorganic hybrid composition containing (A) a metal or a semimetal element, wherein the aggregation domain size of the metal or semimetal element is 1 to 5 nm, and the metal or semi-metal element (B) a compound (Q) capable of generating an acid upon irradiation with an actinic ray or radiation; and (B) a compound , And (C) an organic solvent. |
| priorityDate |
2015-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |