http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180008512-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6c7abd1665a53282a4bcbc630cc7e70 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-035 |
| filingDate | 2016-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_330d6fd839f7527932d60c2c723326ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_361a2dee51280be32de5a59668ef6ff8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4b479d5d4bc034be3d3cd0c1ddc6a6c |
| publicationDate | 2018-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20180008512-A |
| titleOfInvention | Processes and facilities for the decomposition of monosilane |
| abstract | A process for the decomposition of monosilanes is described wherein the monosilane-containing gas stream is circulated in a circulation system comprising a reactor for the decomposition of said monosilane present in said gas stream. In the process, the gas stream is injected into the reactor and is contacted with a highly heated surface inside the reactor. The portion of the monosilane present in the gas stream at the surface is decomposed and the solid silicon layer is deposited to reduce the concentration of the monosilane in the gas stream. The gas stream is discharged from the reactor and reprocessed, and the monosilane is added to the gas stream. The reprocessed gas stream is then re-injected into the reactor. Operating pressures in the range of 2.5 bar to 10 bar during the deposition are established within the circulation system. The gas stream enters the reactor at a rate of less than 7.5 m / s. Also suitable facilities for carrying out the process are described. |
| priorityDate | 2015-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.