| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_56db81f6eb60da43b90fd720b484b743 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0177
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0115 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00444
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00373 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate |
2016-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5f666471bfd691bd813ca46a52d14bd |
| publicationDate |
2018-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180004974-A |
| titleOfInvention |
manufacturing Method of micromechanical structure including porous silicon oxide and a micromechanical structure by the same |
| abstract |
The present invention relates to a method of manufacturing a micro mechanical structure including a porous silicon oxide film, and more particularly, to a method of manufacturing a micro mechanical structure including a porous silicon oxide film by controlling a thickness of the oxide film to several micrometers to several tens of micrometers, The present invention relates to a method for manufacturing a micro mechanical structure, |
| priorityDate |
2016-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |