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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06
filingDate 2016-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f51441799083a86ee9b573411d507bbe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f4b2697a65a7de7672edae01cbd9b94
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publicationDate 2018-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20180004870-A
titleOfInvention Etching solution for silicon substrate
abstract More particularly, the present invention relates to a silicon substrate etching solution, and more particularly, to a silicon nitride film having a higher selectivity for a silicon nitride film than a silicon oxide film, and a silicon additive is not used in the etching solution, To a silicon substrate etching solution.
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priorityDate 2016-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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