| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24 |
| filingDate |
2015-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0956682bd5481ad9d0191edceb7d33b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cd00f0b1131f29b038e7ce284b71ad6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a94ddff899d9e8295505bf252ed7e966 |
| publicationDate |
2017-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20170139675-A |
| titleOfInvention |
Diffusion barriers for oscillation corrections, measurement assemblies for measuring deposition rates and methods therefor |
| abstract |
Is a detection element for a measurement assembly adapted to measure the rate of deposition of evaporated material on a substrate. The detection element includes: an oscillation correction for detecting a deposition rate; And a barrier layer comprising a barrier material covering at least a portion of the oscillation crystal, the barrier layer being configured to prevent the vaporized material from diffusing into the oscillation crystal. |
| priorityDate |
2015-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |