| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d51b723a2d8eb04c7a282a4cc006b70a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67706
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G49-061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1303
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G49-067 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G49-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 |
| filingDate |
2017-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d3d104e994deeb518886a1d71e4d318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d42cf600f809eee4851b0062a2bab8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e20ddb4db8a4d58126dbbea1de330247 |
| publicationDate |
2017-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20170132118-A |
| titleOfInvention |
Speed Buffer, In-Line Type Substrate Processing System and Controlling Method Therefor |
| abstract |
A speed buffer, a continuous substrate processing system including the same, and a control method thereof are disclosed. A speed buffer according to an embodiment of the present invention is a speed buffer for transferring a substrate to be transferred in a first direction and carrying it out. The speed buffer includes a first sensor for detecting whether the substrate is carried or not, And a driver for controlling the rotational speed of the roller for transferring the rear substrate in response to the transfer speed of the rear substrate determined so that the post-substrate and the selection substrate have a target gap before the second sensor and the selection substrate are completely taken out of the speed buffer can do. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200028149-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110880461-A |
| priorityDate |
2017-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |