Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-065 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45555 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C251-08 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
filingDate |
2016-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10359a6075ec23e1fdf4e73a80295781 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c22ae607ca401d5bfb59d4d23594d12d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f7df5dca00e4b4f6b8015ce50aa19ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14f87cd55c3b72d5ceb3f3a479800cea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a384b0dd8bc9e7c236ae673d124a708 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0701845e5186301c029508797bd4590 |
publicationDate |
2017-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20170127492-A |
titleOfInvention |
Diazadienyl compound, raw material for forming thin film, method for producing thin film, and diazadiene compound |
abstract |
A diazadienyl compound represented by the following general formula (I). (I) (Wherein R 1 and R 2 each independently represents a linear or branched alkyl group having 1 to 6 carbon atoms, R 3 represents a hydrogen atom or a straight or branched alkyl group having 1 to 6 carbon atoms, M represents a metal Atom or a silicon atom, and n represents a valence of a metal atom or silicon atom represented by M) |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210013775-A |
priorityDate |
2015-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |