abstract |
A method of manufacturing a magnetic core according to the present invention includes the steps of forming a single magnetic layer on a dielectric layer, forming a first photoresist layer on a single magnetic layer, and patterning the first photoresist layer, Layer is patterned to include a first portion covered by a first photoresist layer and a second portion exposed from the first photoresist layer, and etching a single magnetic layer, wherein a second portion of the single- The first portion of the single magnetic layer is etched to have an inclined side surface after the single magnetic layer is etched, the first photoresist layer is removed, and a second photoresist layer And patterning the second photoresist layer overlying at least a first portion of the single magnetic layer having a tilted side, etching the single magnetic layer, To remove the layer. |