| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A62D2101-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A62D2101-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A62D2101-28 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A62D3-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32844
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32834 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A62D101-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A62D101-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A62D101-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A62D3-19 |
| filingDate |
2015-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9213a9ad4bc07a795fdd9abebcc121f |
| publicationDate |
2017-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20170094439-A |
| titleOfInvention |
Plasma abatement using water vapor in conjunction with hydrogen or hydrogen containing gases |
| abstract |
A plasma abatement process for reducing the effluent containing PFC gas from the processing chamber is described. The plasma abatement process takes a gaseous foreline effluent from a processing chamber, e.g., an etch chamber, and reacts with effluents in a plasma chamber located in the foreline path. Plasma dissociates the PFC gases and reacts them with reagents to convert the effluent to a compound that is non-global warming and can be easily removed by typical plant scrubbing techniques. The present disclosure describes methods for controlling reagent hydrogen-to-oxygen ratios such that reduced compounds, in addition to PFC destruction, have a modified composition to enable extension of the maintenance interval for downstream support equipment . |
| priorityDate |
2014-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |