Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33c922e05f6133b7d72dbb849d77487d http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_35c78f5fa92922b5b31c960bd7d015a9 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2002-90 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F13-1011 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F3-188 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F23-69 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-0682 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F33-8052 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01F3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01F13-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J15-00 |
filingDate |
2016-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_971e13f3bcdfe06df6a4a6a28c71fa86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cfc896ddca857e56a5b9f8552100fe2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f6282106163445b18b7c87211cfc53d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd09ced1ae3fc082d758920cfea2114d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e90756b9fd25235e236decbeabfb4168 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ceb64c2cff40aa3c3cac7fffc37c100 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b092174d0a8d180a4c32181f2b7d91b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be4400086f460ff7142074773e33664c |
publicationDate |
2017-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20170076542-A |
titleOfInvention |
METHOD OF PRODUCING α-SILICON NITRIDE |
abstract |
the generation of? silicon nitride is suppressed, and? silicon nitride is produced at a high yield. As a method for producing? silicon nitride, there is proposed a method of preparing a silicon nitride and a nitrogen-based reaction gas by adding a? retardation inhibitor for inhibiting the transition from? silicon nitride to silicon nitride and adding the metal silicon and the nitrogen- And obtaining? -Silicon nitride while inhibiting the formation of? Silicon nitride. |
priorityDate |
2015-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |