abstract |
(A) a photosensitive resin composition comprising a polysiloxane obtained by subjecting a compound represented by the following formula (1) and an alcohol having 4 or more carbon atoms to a hydrolysis and condensation reaction, (B) a quinone diazide compound, and (C) a solvent; And a cured film formed on the substrate, (Formula 1) (R 1 ) a SiX 1 4 -a In Formula (1), R 1 , X 1 , and a are as defined in the description of the invention. |