http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170067356-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D487-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D471-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D487-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D471-10 |
| filingDate | 2015-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e281b2b21fb2c5d1cb506f4d47d49c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_813e0e460b2bf852de31d8762bc4b614 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28822d7408eab9f123bf757caa7d3cd7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89680b58c6eca161856eb6452cf27828 |
| publicationDate | 2017-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20170067356-A |
| titleOfInvention | Composition for forming film, film, method for producing patterned substrate, and compound |
| abstract | [PROBLEMS] To provide a film-forming composition which is excellent in solvent solubility in PGMEA and the like and which can satisfactorily satisfy general characteristics such as etching resistance, and can form a film having excellent heat resistance and flatness. [Solution] The present invention is a film-forming composition containing a compound having a partial structure represented by the following formula (1) and having an intermolecular bond-forming group, and a solvent. X 1 and X 2 in the following formula (1) each independently represent a ring structure of a substituted or unsubstituted reduced number of 4 to 10 formed together with a spiro carbon atom and a carbon atom of an aromatic ring. a1 and a2 are each independently an integer of 0 to 8; n1 and n2 are each independently an integer of 0 to 2; k1 and k2 are each independently an integer of 0 to 8; However, k1 + k2 is 1 or more. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019143107-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190010493-A |
| priorityDate | 2015-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 285.