abstract |
(A) a siloxane compound represented by the following formula (1); (B) a quinone diazide compound, and (C) a solvent. [Chemical Formula 1] (R 1 R 2 SiO 2/2 ) D (R 3 SiO 3/2 ) T 1 (SiO 3/2 -Y-SiO 3/2 ) T2 In Formula 1, The definition of R 1 to R 3 , Y, D, T 1, and T 2 is the same as described in the description of the invention. |